Sub-1mG Inertial Sensors by Multi-layer Metal Technology

Publication Information

Title

Japanese:
English:	Sub-1mG Inertial Sensors by Multi-layer Metal Technology

Author

Japanese:	山根大輔, 小西敏文, 年吉洋, 町田克之, 益一哉.
English:	Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

F5-05

Published date

Nov. 5, 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:	IUMRS International Conference in Asia (IUMRS-ICA) 2017

Conference site

Japanese:	Taipei
English:

Official URL