Enhancement in Structure Stability of Gold Micro-Cantilever by Constrainted Fixed-End in MEMS devices

Publication Information

Title

Japanese:
English:	Enhancement in Structure Stability of Gold Micro-Cantilever by Constrainted Fixed-End in MEMS devices

Author

Japanese:	寺西美波, 陳君怡, Chang Tso-Fu Mark, 小西敏文, 町田克之, 山根大輔, 益一哉, 曽根正人.
English:	Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Toshifumi Konishi, Katsuyuki Machida, Daisuke Yamane, Kazuya Masu, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:	Microelectronic Engineering

Volume, Number, Page

Vol. 187-188 pp. 105-109

Published date

Apr. 1, 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI