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Title
Japanese: 
English:Development of Bipolar Electrostatic Chuck Module Having Array of Beam Assembly Using Lithography Technique 
Author
Japanese: 崔勝萬, 若林一貴, 齋藤滋規.  
English: Seungman Choi, Kazuki Wakabayashi, Shigeki SAITO.  
Language English 
Journal/Book name
Japanese: 
English:2017 MRS FALL MEETING & EXHIBIT 
Volume, Number, Page         Page 295
Published date Nov. 27, 2017 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English:2017 Materials Research Society Fall meeting (MRS 2017) 
Conference site
Japanese: 
English:Boston, Massachusetts 

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