Development of Bipolar Electrostatic Chuck Module Having Array of Beam Assembly Using Lithography Technique

Publication Information

Title

Japanese:
English:	Development of Bipolar Electrostatic Chuck Module Having Array of Beam Assembly Using Lithography Technique

Author

Japanese:	崔勝萬, 若林一貴, 齋藤滋規.
English:	Seungman Choi, Kazuki Wakabayashi, Shigeki SAITO.

Language

English

Journal/Book name

Japanese:
English:	2017 MRS FALL MEETING & EXHIBIT

Volume, Number, Page

Page 295

Published date

Nov. 27, 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2017 Materials Research Society Fall meeting (MRS 2017)

Conference site

Japanese:
English:	Boston, Massachusetts