電解めっき法によるMEMS⽤⾦銅合⾦の作製及び機械的特性評価

Publication Information

Title

Japanese:	電解めっき法によるMEMS⽤⾦銅合⾦の作製及び機械的特性評価
English:

Author

Japanese:	TangHao-Chun, Chun-Yi Chen, Tso-Fu Mark Chang, ⼭根⼤輔, 小西敏文, 町⽥克之, 益⼀哉, 曽根正⼈.
English:	Hao-Chun Tang, Chun Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone.

Language

Japanese

Journal/Book name

Japanese:	応用物理学会第65回春季講演会
English:

Volume, Number, Page

Published date

Mar. 17, 2018

Publisher

Japanese:
English:

Conference name

Japanese:	応用物理学会第６５回春季講演会
English:

Conference site

Japanese:	東京
English: