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Title
Japanese:単一Au錘3軸差動MEMS加速度センサの検討 
English:A Tri-axis Differential MEMS Accelerometer with a Single Au Proof Mass 
Author
Japanese: 新島 宏文, 乙部 翔太, 高安 基大, 山根 大輔, 伊藤 浩之, 佐布 晃昭, 小西 敏文, 道正 志郎, 飯田 慎一, 石原 昇, 町田 克之, 益 一哉.  
English: Hirofumi Niijima, Shouta Otobe, Motohiro Takayasu, Daisuke Yamane, Hiroyuki Ito, Teruaki Safu, Toshifumi Konishi, Shiro Dosho, Shinichi Iida, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Mar. 14, 2018 
Publisher
Japanese: 
English: 
Conference name
Japanese:平成30年電気学会全国大会 
English: 
Conference site
Japanese:福岡県 
English: 

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