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Title
Japanese:積層メタル技術を用いたMEMS慣性センサの封止環境における温度依存性 
English: 
Author
Japanese: 小西 敏文, 山根 大輔, 佐布 晃昭, 陳 君怡, Chang Tso-Fu Mark, 伊藤 浩之, 道正 志郎, 石原 昇, 曽根 正人, 町田 克之, 益 一哉, 飯田 慎一.  
English: Toshifumi Konishi, Daisuke Yamane, Teruaki Safu, Chun Yi Chen, Tso-Fu Mark Chang, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Masato Sone, Katsuyuki Machida, Kazuya Masu, Shinichi Iida.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Mar. 17, 2018 
Publisher
Japanese: 
English: 
Conference name
Japanese:第64回応用物理学会春季学術講演会 
English: 
Conference site
Japanese:東京都 
English: 

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