水素ラジカル支援パルスレーザ堆積法を用いたZrH<sub>2</sub>薄膜の作製

Publication Information

Title

Japanese:	水素ラジカル支援パルスレーザ堆積法を用いたZrH₂薄膜の作製
English:	Fabrication of ZrH₂ thin films using hydrogen-radical assisted pulsed-laser deposition

Author

Japanese:	西暁登, 吉松公平, 大友明.
English:	Akito Nishi, K. Yoshimatsu, A. Ohtomo.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 17, 2018

Publisher

Japanese:
English:

Conference name

Japanese:	第65回応用物理学会春季学術講演会
English:	The 65th JSAP Spring Meeting, 2017

Conference site

Japanese:	東京
English:	Tokyo

Official URL