Tri-Axis Fully-Differential MEMS Accelerometer with Segmented Capacitance Detection

Publication Information

Title

Japanese:
English:	Tri-Axis Fully-Differential MEMS Accelerometer with Segmented Capacitance Detection

Author

Japanese:	乙部翔太, 山根大輔, 小西敏文, 佐布晃昭, 伊藤浩之, 道正志郎, 石原昇, 町田克之, 益一哉.
English:	Shota Otobe, Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 24, 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Asia-Pacific Conference of Transducers and Micro-Nano Technology 2018 (APCOT 2018)

Conference site

Japanese:
English:	Hong Kong