Growth of (111)-oriented epitaxial magnesium silicide (Mg2Si) films on (001) Al2O3 substrates by RF magnetron sputtering and their properties

Publication Information

Title

Japanese:
English:	Growth of (111)-oriented epitaxial magnesium silicide (Mg2Si) films on (001) Al2O3 substrates by RF magnetron sputtering and their properties

Author

Japanese:	片桐淳生, 小川正太, 上原睦雄, P. S. Sankara Rama Krishnan, 黒川満央, 松島正明, 清水荘雄, 秋山賢輔, 舟窪浩.
English:	Atsuo Katagiri, Shota Ogawa, Mutsuo Uehara, P. S. Sankara Rama Krishnan, Mao Kurokawa, Masaaki Matsushima, Takao Shimizu, Kensuke Akiyama, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	J. Mater. Sic.

Volume, Number, Page

vol. 53 no. 7 pp. 5151-5158

Published date

Apr. 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: