Pattern Similarity Metrics for Layout Pattern Classification and their Validity Analysis by Lithographic Responses

Publication Information

Title

Japanese:
English:	Pattern Similarity Metrics for Layout Pattern Classification and their Validity Analysis by Lithographic Responses

Author

Japanese:	高橋篤司, 佐藤真平, 小椋弘貴, Yu-Min Sung, Ting-Chi Wang.
English:	Atsushi Takahashi, Shimpei Sato, Hiroki Ogura, Yu-Min Sung, Ting-Chi Wang.

Language

English

Journal/Book name

Japanese:
English:	Proc. 2018 IEEE Computer Society Annual Symposium on VLSI (ISVLSI)

Volume, Number, Page

pp. 494-497

Published date

July 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:	Hong Kong

DOI