EFFECTIVE YOUNG’S MODULUS EVALUATION OF TI/AU MICRO STRUCTURES FOR MEMS ACCELEROMETER

Publication Information

Title

Japanese:
English:	EFFECTIVE YOUNG’S MODULUS EVALUATION OF TI/AU MICRO STRUCTURES FOR MEMS ACCELEROMETER

Author

Language

English

Journal/Book name

Japanese:
English:	8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS"

Volume, Number, Page

Published date

Sept. 12, 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:	8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS"

Conference site

Japanese:
English:	Ostrava