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Title
Japanese:微細毛構造を用いた静電チャック 
English: 
Author
Japanese: 齋藤滋規.  
English: Shigeki SAITO.  
Language Japanese 
Journal/Book name
Japanese:静電気学会講演論文集2018 
English: 
Volume, Number, Page         p. 33-34
Published date Sept. 13, 2018 
Publisher
Japanese:一般社団法人静電気学会 
English: 
Conference name
Japanese:第42回静電気学会全国大会 
English: 
Conference site
Japanese:東京 
English: 

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