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Title
Japanese:微細毛構造による表面柔軟性を持つ静電チャック 
English: 
Author
Japanese: 齋藤滋規.  
English: Shigeki SAITO.  
Language Japanese 
Journal/Book name
Japanese:静電気学会誌 
English: 
Volume, Number, Page Vol. 41    No. 3    p. 134-138
Published date May 31, 2017 
Publisher
Japanese:一般社団法人静電気学会 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 

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