反応性マグネトロンスパッタ法を用いたYH2エピタキシャル薄膜の配向制御

Publication Information

Title

Japanese:	反応性マグネトロンスパッタ法を用いたYH2エピタキシャル薄膜の配向制御
English:

Author

Japanese:	小松遊矢, 清水亮太, 笹原悠輝, 西尾和記, 大口裕之, 折茂慎一, 一杉太郎.
English:	Yuya Komatsu, Ryota Shimizu, Yuki Sasahara, Kazunori Nishio, 大口裕之, 折茂慎一, Taro Hitosugi.

Language

Japanese

Journal/Book name

Japanese:
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Volume, Number, Page

Published date

Mar. 2018

Publisher

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Conference name

Japanese:	第65回応用物理学会春季学術講演会
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Conference site

Japanese:
English: