各種層間絶縁膜を用いた薄膜π型マイクロTEGモジュールの最適設計

Publication Information

Title

Japanese:	各種層間絶縁膜を用いた薄膜π型マイクロTEGモジュールの最適設計
English:	Design optimization of π-type thin-film micro-TEG modules using various interlayer insulators

Author

Japanese:	熊谷颯人, 塩津勇作, 大久保岳, 菅原聡.
English:	Hayato Kumagai, Yusaku Shiotsu, Takashi Okubo, Satoshi Sugahara.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

21p-438-3

Published date

Sept. 2018

Publisher

Japanese:
English:

Conference name

Japanese:	第79回応用物理学会秋季学術講演会
English:	The 79th JSAP Autumn Meeting

Conference site

Japanese:	名古屋
English:	Nagoya