Humidity dependence of electrostatic pick-and-place operation of a micro dielectric particle considering surface conductivity and capillary condensation

Publication Information

Title

Japanese:
English:	Humidity dependence of electrostatic pick-and-place operation of a micro dielectric particle considering surface conductivity and capillary condensation

Author

Japanese:	藤原亮, 井口洋二, 高橋邦夫, 齋藤滋規.
English:	Ryo Fujiwara, Yoji Iguchi, KUNIO TAKAHASHI, Shigeki SAITO.

Language

English

Journal/Book name

Japanese:
English:	Journal of Applied Physics

Volume, Number, Page

Vol. 124 No. 6 pp. 064303

Published date

Aug. 14, 2018

Publisher

Japanese:
English:	AIP Publishing

Conference name

Japanese:
English:

Conference site

Japanese:
English: