Development of a Bipolar Electrostatic Chuck Module having a Beam-array Assembly using a Multiple-Etching Process

Publication Information

Title

Japanese:
English:	Development of a Bipolar Electrostatic Chuck Module having a Beam-array Assembly using a Multiple-Etching Process

Author

Japanese:	崔勝萬, 若林一貴, 高橋邦夫, 齋藤滋規.
English:	Seungman Choi, Kazuki Wakabayashi, KUNIO TAKAHASHI, Shigeki SAITO.

Language

English

Journal/Book name

Japanese:
English:	Journal of Micromechanics and Microengineering

Volume, Number, Page

Published date

Oct. 16, 2018

Publisher

Japanese:
English:	IOP Publishing

Conference name

Japanese:
English:

Conference site

Japanese:
English: