A Sub-1mG Tri-Axis MEMS Accelerometer with Multiple Segmented Capacitance Detection Electrodes

Publication Information

Title

Japanese:
English:	A Sub-1mG Tri-Axis MEMS Accelerometer with Multiple Segmented Capacitance Detection Electrodes

Author

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 13, 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:	31st International Microprocesses and Nanotechnology Conference (MNC2018)

Conference site

Japanese:
English:	Sapporo