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Title
Japanese: 
English:Temperature Dependence on Package Sealing Ambient of MEMS Sensor Fabricated by Gold Electroplating 
Author
Japanese: 小西敏文, 山根大輔, 佐布晃昭, 陳君怡, Tso-Fu Mark Chang, 伊藤浩之, 道正志郎, 石原昇, 曽根正人, 町田克之, 益一哉, 飯田慎一.  
English: Toshifumi Konishi, Daisuke Yamane, Teruaki Safu, Chun Yi Chen, Tso-Fu Mark Chang, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Masato Sone, Katsuyuki Machida, Kazuya Masu, Shinichi Iida.  
Language English 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Nov. 6, 2017 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English:The 30th International Microprocesses and Nanotechnology Conference 
Conference site
Japanese:Jeju 
English: 

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