Crystallinity improvement using migration-enhancement methods for sputtered-MoS2 films

Publication Information

Title

Japanese:	Crystallinity Improvement using Migration-Enhancement Methods for Sputtered-MoS2 Films
English:	Crystallinity improvement using migration-enhancement methods for sputtered-MoS2 films

Author

Japanese:	S. Hirano, 清水淳一, 松浦賢太朗, 大橋匠, 宗田伊理也, 角嶋邦之, 筒井一生, 若林整.
English:	S. Hirano, J. Shimizu, K. Matsuura, T. Ohashi, I. Muneta, K. Kakushima, K. Tsutsui, H. Wakabayashi.

Language

English

Journal/Book name

Japanese:	2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM)
English:	2017 IEEE Electron Device Technology and Manufacturing Conference (EDTM)

Volume, Number, Page

pp. 234-235

Published date

June 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM)

Conference site

Japanese:	富山
English:	Toyama

Official URL

DOI