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Title
Japanese: 
English:A 3-D PARALLEL-PLATE MEMS ACCELEROMETER WITH A GOLD PROOF MASS 
Author
Japanese: 山根 大輔, 乙部 翔太, 渥美 賢, 古賀 達也, 小西 敏文, 佐布 晃昭, 飯田 慎一, 伊藤 浩之, 石原 昇, 町田 克之, 益 一哉.  
English: Daisuke Yamane, Shota Otobe, Ken Atsumi, Tatsuya Koga, Toshifumi Konishi, Teruaki Safu, Shinichi Iida, Hiroyuki Ito, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu.  
Language English 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page         pp. 684-687
Published date Jan. 27, 2019 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English:32nd Int. Conf. on Micro Electro Mechanical Systems (MEMS 2019) 
Conference site
Japanese: 
English:Seoul 
Official URL http://www.mems19.org/html/main.php
 

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