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Publication Information
Title
Japanese:
English:
A 3-D PARALLEL-PLATE MEMS ACCELEROMETER WITH A GOLD PROOF MASS
Author
Japanese:
山根 大輔
,
乙部 翔太
,
渥美 賢
,
古賀 達也
,
小西 敏文
,
佐布 晃昭
,
飯田 慎一
,
伊藤 浩之
,
石原 昇
,
町田 克之
,
益 一哉
.
English:
Daisuke Yamane
,
Shota Otobe
,
Ken Atsumi
,
Tatsuya Koga
,
Toshifumi Konishi
,
Teruaki Safu
,
Shinichi Iida
,
Hiroyuki Ito
,
Noboru Ishihara
,
Katsuyuki Machida
,
Kazuya Masu
.
Language
English
Journal/Book name
Japanese:
English:
Volume, Number, Page
pp. 684-687
Published date
Jan. 27, 2019
Publisher
Japanese:
English:
Conference name
Japanese:
English:
32nd Int. Conf. on Micro Electro Mechanical Systems (MEMS 2019)
Conference site
Japanese:
English:
Seoul
Official URL
http://www.mems19.org/html/main.php
©2007
Tokyo Institute of Technology All rights reserved.