Achieving 63 pm Resolution in Scanning Transmission Electron Microscope with Spherical Aberration Corrector

Publication Information

Title

Japanese:
English:	Achieving 63 pm Resolution in Scanning Transmission Electron Microscope with Spherical Aberration Corrector

Author

Japanese:	沢田英敬, 細川史生, 金山俊克, 西澤孝史, M. Terao, M. Kawazoe, 三宮工, T. Tomita, Y. Kondo, T. Tanaka, Y. Oshima, Y. Tanishiro, N. Yamamoto, K. Takayanagi.
English:	H. Sawada, F. Hosokawa, T. Kaneyama, T. Ishizawa, M. Terao, M. Kawazoe, T. Sannomiya, T. Tomita, Y. Kondo, T. Tanaka, Y. Oshima, Y. Tanishiro, N. Yamamoto, K. Takayanagi.

Language

English

Journal/Book name

Japanese:
English:	Japanese Journal of Applied Physics

Volume, Number, Page

Vol. 46 No. 20-24 pp. L568-L570

Published date

June 2007

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI