p-μc-SiOx:H/酸化物積層構造のパッシベーション効果と抵抗値評価

Publication Information

Title

Japanese:	p-μc-SiOx:H/酸化物積層構造のパッシベーション効果と抵抗値評価
English:	Passivation and resistance evaluation of p-μc-SiOx:H/oxide layer stacked structures

Author

Japanese:	中田和吉.
English:	Kazuyoshi Nakada.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 5, 2017

Publisher

Japanese:
English:

Conference name

Japanese:	第78回応用物理学会秋季学術講演会
English:	The 78th JSAP Autumn Meeting, 2017

Conference site

Japanese:	福岡
English: