マイクロ波加熱を用いたNbドープTiO2薄膜の固相結晶化

Publication Information

Title

Japanese:	マイクロ波加熱を用いたNbドープTiO2薄膜の固相結晶化
English:

Author

Japanese:	保崎正道, 松久将之, 遊馬博明, 中尾祥一郎, 長谷川哲也, 清水亮太, 西尾和記, 和田雄二, 一杉太郎.
English:	Masamichi Hosaki, Masayuki Matsuhisa, Hiroaki Asoma, 中尾祥一郎, Tetsuya Hasegawa, Ryota Shimizu, Kazunori Nishio, Yuji Wada, Taro Hitosugi.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 2019

Publisher

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English:

Conference name

Japanese:
English:	第66回応用物理学会春季学術講演会

Conference site

Japanese:
English: