Epitaxial growth of CaNxHy thin films using reactive magnetron sputtering

Publication Information

Title

Japanese:
English:	Epitaxial growth of CaNxHy thin films using reactive magnetron sputtering

Author

Japanese:	CHON Seoungmin, 小林成, 西尾和記, 清水亮太, 一杉太郎.
English:	Seoungmin Chon, Shigeru Kobayashi, Kazunori Nishio, Ryota Shimizu, Taro Hitosugi.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:	第66回応用物理学会春季学術講演会

Conference site

Japanese:
English: