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Title
Japanese:集合梁構造により表面柔軟性を有する双極型静電吸着デザイスの大面積化 
English: 
Author
Japanese: 林輝道, HEMTHAVYPASOMPHONE, 高橋邦夫, 齋藤滋規.  
English: Terumichi Hayashi, PASOMPHONE HEMTHAVY, KUNIO TAKAHASHI, Shigeki SAITO.  
Language Japanese 
Journal/Book name
Japanese:2019年度精密工学会春季大会講演論文集 
English: 
Volume, Number, Page         p. 30
Published date Mar. 13, 2019 
Publisher
Japanese:公益社団法人精密工学会 
English: 
Conference name
Japanese:2019年度精密工学会春季大会 
English: 
Conference site
Japanese:東京 
English: 

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