Home >

news Help

Publication Information


Title
Japanese:微細毛構造を有するシリコン双極型静電チャックの接触面の平滑さと微細毛長が静電力に与える影響 
English: 
Author
Japanese: 河鰭 康平, HEMTHAVYPASOMPHONE, 高橋邦夫, 齋藤滋規.  
English: Kohei Kawabata, PASOMPHONE HEMTHAVY, KUNIO TAKAHASHI, Shigeki SAITO.  
Language Japanese 
Journal/Book name
Japanese:日本機械学会第9回マイクロ・ナノシンポジウム講演論文集 
English: 
Volume, Number, Page        
Published date Oct. 30, 2018 
Publisher
Japanese: 
English: 
Conference name
Japanese:日本機械学会第9回「マイクロ・ナノ工学シンポジウム」 
English: 
Conference site
Japanese:札幌 
English: 

©2007 Tokyo Institute of Technology All rights reserved.