Pillar-Shaped Electrodes for 3-axis Gold-Proof-Mass MEMS Capacitive Accelerometers

Publication Information

Title

Japanese:
English:	Pillar-Shaped Electrodes for 3-axis Gold-Proof-Mass MEMS Capacitive Accelerometers

Author

Japanese:	渥美賢, 乙部翔太, 古賀達也, Takashi Ichikawa, 山根大輔, 飯田慎一, 伊藤浩之, 石原昇, 曽根正人, 町田克之, 益一哉.
English:	Ken Atsumi, Shota Otobe, Tatsuya Koga, Takashi Ichikawa, Daisuke Yamane, Shinichi Iida, Hiroyuki Ito, Noboru Ishihara, Masato Sone, Katsuyuki Machida, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:	IEEE Conference Paper

Volume, Number, Page

Published date

May 12, 2019

Publisher

Japanese:
English:	IEEE

Conference name

Japanese:
English:	Design, Test, Integration & Packaging of MEMS/MOEMS(DTIP2019)

Conference site

Japanese:
English:	Paris

Official URL

DOI