Home >

news Help

Publication Information


Title
Japanese: 
English:Cu-Alloying Effect on Structure Stability of Electrodeposited Gold-Based Micro-Cantilever Evaluated by Long-Term Vibration Test 
Author
Japanese: 新田 京太朗, Chang Tso-Fu Mark, 橘 航一朗, Tang Hao-Chun, 陳 君怡, 飯田 慎一, 山根 大輔, 伊藤 浩之, 町田 克之, 益 一哉, 曽根 正人.  
English: Kyotaro Nitta, Tso-Fu Mark Chang, Koichiro Tachibana, Hao-chun Tang, Chun-Yi Chen, Shinichi Iida, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone.  
Language English 
Journal/Book name
Japanese: 
English:Microelectronic Engineering 
Volume, Number, Page Vol. 215        pp. 111001
Published date May 20, 2019 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 

©2007 Tokyo Institute of Technology All rights reserved.