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Title
Japanese:3軸Au錘MEMS加速度センサにおける検出電極構造の検討 
English: 
Author
Japanese: 市川 崇志, 新島 宏文, 古賀 達也, 山根 大輔, 飯田 慎一, 伊藤 浩之, 石原 昇, 曽根 正人, 町田 克之, 益 一哉.  
English: Takasi Itikawa, Hirofumi Niijima, Sayaka Koga, Daisuke Yamane, Shinichi Iida, Hiroyuki Ito, Noboru Ishihara, Masato Sone, Katsuyuki Machida, Kazuya Masu.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page         pp. 67-72
Published date July 1, 2019 
Publisher
Japanese: 
English: 
Conference name
Japanese:令和元年電気学会センサ・マイクロマシン部門総合研究会 
English: 
Conference site
Japanese:神奈川県 
English: 

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