Thickness-dependent crystal structure and electric properties of epitaxial ferroelectric Y2O3-HfO2 films

Publication Information

Title

Japanese:
English:	Thickness-dependent crystal structure and electric properties of epitaxial ferroelectric Y2O3-HfO2 films

Author

Japanese:	三村和仙, 清水荘雄, 内田寛, 坂田修身, 舟窪浩.
English:	Takanori Mimura, Takao Shimizu, Hiroshi Uchida, Osami Sakata, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	Appl. Phys. Lett.

Volume, Number, Page

Vol. 113 pp. 102901-1-4

Published date

Sept. 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI