Crystallization behavior and ferroelectric property of HfO2–ZrO2 films fabricated by chemical solution deposition

Publication Information

Title

Japanese:
English:	Crystallization behavior and ferroelectric property of HfO2–ZrO2 films fabricated by chemical solution deposition

Author

Japanese:	Shuhei Nakayama, 舟窪浩, 内田寛.
English:	Shuhei Nakayama, Hiroshi Funakubo, Hiroshi Uchida.

Language

English

Journal/Book name

Japanese:
English:	Jpn. J. Appl. Phys.

Volume, Number, Page

Vol. 57 pp. 11UF06-1-5

Published date

Sept. 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI