Resistivity reduction of low-carrier-density sputtered-MoS2film using fluorine gas

Publication Information

Title

Japanese:
English:	Resistivity reduction of low-carrier-density sputtered-MoS2film using fluorine gas

Author

Japanese:	Okada, Y., Yamaguchi, S., Ohashi, T., Muneta, I., Kasushima, K., Tsutsui, K., 若林整.
English:	Okada, Y., Yamaguchi, S., Ohashi, T., Muneta, I., Kasushima, K., Tsutsui, K., Hitoshi Wakabayashi.

Language

English

Journal/Book name

Japanese:
English:	17th International Workshop on Junction Technology, IWJT 2017

Volume, Number, Page

pp. 44-46

Published date

2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI