高周波強力超音波トランスデューサ用圧電結晶膜の製膜 とその評価

Publication Information

Title

Japanese:	高周波強力超音波トランスデューサ用圧電結晶膜の製膜とその評価
English:	Deposition of epitaxial piezoelectric films for high intensity and high frequency ultrasonic transducers

Author

Japanese:	石河睦生, 内田庸助, 塚本絢穂, 齋藤直, 遠藤聡人, 安井伸太郎, 田原麻梨江, 舟窪浩, 黒澤実.
English:	Mutsuo Ishikawa, 内田庸助, Ayaho Tsukamoto, 齋藤直, 遠藤聡人, Shintaro Yasui, Marie Tabaru, HIROSHI FUNAKUBO, Minoru Kuribayashi Kurosawa.

Language

Japanese

Journal/Book name

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Volume, Number, Page

Published date

Sept. 2019

Publisher

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Conference name

Japanese:	第80回応用物理学会秋季学術講演会 (18p-PA3-3)
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Conference site

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