A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology

Publication Information

Title

Japanese:
English:	A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology

Author

Japanese:	山根大輔, Konishi, T., Safu, T., Toshiyoshi, H., 曽根正人, 益一哉, 町田克之.
English:	Daisuke Yamane, Konishi, T., Safu, T., Toshiyoshi, H., Masato Sone, Kazuya Masu, Katsuyuki Machida.

Language

English

Journal/Book name

Japanese:
English:	2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016

Volume, Number, Page

pp. 419-422

Published date

2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI