Development of novel Pb, Li, Na and K-free piezoelectric materials for Si-based MEMS application

Publication Information

Title

Japanese:
English:	Development of novel Pb, Li, Na and K-free piezoelectric materials for Si-based MEMS application

Author

Japanese:	舟窪浩, 安井伸太郎, Yazawa, K., Nagata, J., Oikawa, T., Yamada, T., Uchida, H..
English:	HIROSHI FUNAKUBO, Shintaro Yasui, Yazawa, K., Nagata, J., Oikawa, T., Yamada, T., Uchida, H..

Language

English

Journal/Book name

Japanese:
English:	Proceedings of 2012 21st IEEE Int. Symp. on Applications of Ferroelectrics held jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE PFM, ISAF/ECAPD/PFM 2012

Volume, Number, Page

Published date

2012

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
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DOI