Measurement of piezoelectric transverse and longitudinal displacement with atomic force microscopy for PZT thick films

Publication Information

Title

Japanese:
English:	Measurement of piezoelectric transverse and longitudinal displacement with atomic force microscopy for PZT thick films

Author

Japanese:	Kashiwagi, Y., Iijima, T., Aiso, T., Yamamoto, T., Nishida, K., 舟窪浩, Nakajima, T., Okamura, S..
English:	Kashiwagi, Y., Iijima, T., Aiso, T., Yamamoto, T., Nishida, K., HIROSHI FUNAKUBO, Nakajima, T., Okamura, S..

Language

English

Journal/Book name

Japanese:
English:	Materials Research Society Symposium Proceedings

Volume, Number, Page

Vol. 1318 pp. 167-172

Published date

2011

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI