Enhanced perfomance of sensor/actuator integrated piezoelectric microcantilever by using tetragonal compositon PZT thin films

Publication Information

Title

Japanese:
English:	Enhanced perfomance of sensor/actuator integrated piezoelectric microcantilever by using tetragonal compositon PZT thin films

Author

Japanese:	Kobayash, T., Makimoto, N., 舟窪浩, Oikawa, T., Wada, A., Itoh, T., Maeda, R..
English:	Kobayash, T., Makimoto, N., HIROSHI FUNAKUBO, Oikawa, T., Wada, A., Itoh, T., Maeda, R..

Language

English

Journal/Book name

Japanese:
English:	2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Volume, Number, Page

pp. 1879-1882

Published date

2013

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI