Linear actuation piezoelectric microcantilever using tetragonal composition PZT thin films

Publication Information

Title

Japanese:
English:	Linear actuation piezoelectric microcantilever using tetragonal composition PZT thin films

Author

Japanese:	Kobayashi, T., Makimoto, N., Oikawa, T., Wada, A., 舟窪浩, Maeda, R..
English:	Kobayashi, T., Makimoto, N., Oikawa, T., Wada, A., HIROSHI FUNAKUBO, Maeda, R..

Language

English

Journal/Book name

Japanese:
English:	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volume, Number, Page

pp. 413-416

Published date

2013

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI