Detection of Bacterial Fluorescence by the Combination of MEMS Microfluidic Chip and Si Photodetector toward On-chip Biological Sensing

Publication Information

Title

Japanese:
English:	Detection of Bacterial Fluorescence by the Combination of MEMS Microfluidic Chip and Si Photodetector toward On-chip Biological Sensing

Author

Japanese:	Onishi, S., Joon, C. Y., Ishida, M., Sawada, K., Ishii, H., 町田克之, 益一哉, Nikaido, Y., Saito, M., Yoshida, S..
English:	Onishi, S., Joon, C. Y., Ishida, M., Sawada, K., Ishii, H., Katsuyuki Machida, Kazuya Masu, Nikaido, Y., Saito, M., Yoshida, S..

Language

English

Journal/Book name

Japanese:
English:	SEMICONDUCTOR PROCESS INTEGRATION 10

Volume, Number, Page

Vol. 80 No. 4 pp. 157-164

Published date

2017

Publisher

Japanese:
English:	ELECTROCHEMICAL SOC INC

Conference name

Japanese:
English:	Symposium on Semiconductor Process Integration 10 held during the 232nd Meeting of the Electrochemical-Society (ECS)

Conference site

Japanese:
English:	National Harbor

DOI