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Title
Japanese:積層メタル技術で作製したMEMS加速度センサの衝撃特性評価 
English: 
Author
Japanese: 市川 崇志, 古賀 達也, 山根 大輔, 飯田 慎一, 石原 昇, 伊藤 浩之, Chang Tso-Fu Mark, 曽根 正人, 町田 克之, 益 一哉.  
English: Takasi Itikawa, Sayaka Koga, Daisuke Yamane, Shinichi Iida, Noboru Ishihara, Hiroyuki Ito, Tso-Fu Mark Chang, Masato Sone, Katsuyuki Machida, Kazuya Masu.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page         19pm4-A-4
Published date Nov. 19, 2019 
Publisher
Japanese: 
English: 
Conference name
Japanese:第11回集積化MEMSシンポジウム 
English: 
Conference site
Japanese:静岡県 
English: 

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