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Publication Information
Title
Japanese:
CCASを用いた局所特徴量に基づくリソグラフィホットスポット検出器の検討
English:
Author
Japanese:
高橋秀和
,
佐藤真平
,
高橋篤司
.
English:
Hidekazu Takahashi
,
Shimpei Sato
,
Atsushi TAKAHASHI
.
Language
Japanese
Journal/Book name
Japanese:
DAシンポジウム2019 論文集
English:
Proc. DA Symposium 2019, IPSJ Symposium Series
Volume, Number, Page
pp. 99-104
Published date
Aug. 2019
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
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Tokyo Institute of Technology All rights reserved.