Hotspot Detection Methods and their Evaluation in Advanced Lithography

Publication Information

Title

Japanese:
English:	Hotspot Detection Methods and their Evaluation in Advanced Lithography

Author

Japanese:	高橋篤司, 高橋秀和, 小椋弘貴, 佐藤真平.
English:	Atsushi Takahashi, Hidekazu Takahashi, Hiroki Ogura, Shimpei Sato.

Language

English

Journal/Book name

Japanese:
English:	Proc. the 16th International SoC Design Conference (ISOCC '19)

Volume, Number, Page

p. 121

Published date

Oct. 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: