劣勾配法によるプロセスばらつきを考慮したマスク最適化手法

Publication Information

Title

Japanese:	劣勾配法によるプロセスばらつきを考慮したマスク最適化手法
English:	Mask Optimization Considering Process Variation by Subgradient Method

Author

Japanese:	小平行秀, 東梨奈, 松井知己, 高橋篤司, 児玉親亮.
English:	Yukihide Kohira, Rina Azuma, Tomomi Matsui, Atsushi Takahashi, Chikaaki Kodama.

Language

Japanese

Journal/Book name

Japanese:	電子情報通信学会技術研究報告 (VLD2019-53)
English:	IEICE Technical Report (VLD2019-53)

Volume, Number, Page

Vol. 119 No. 282 pp. 197-202

Published date

Nov. 2019

Publisher

Japanese:
English:

Conference name

Japanese:	VLSI設計技術研究会
English:	Technical Committee on VLSI Design Technologies

Conference site

Japanese:
English: