スパッタ成膜中の強磁性薄膜成長過程の内部応力観測

Publication Information

Title

Japanese:	スパッタ成膜中の強磁性薄膜成長過程の内部応力観測
English:	In-situ internal stress observation of growing ferromagnetic thin films during sputter-deposition process

Author

Japanese:	中川茂樹, 林原久憲, 中込将成, 小川良正, 高村陽太.
English:	Shigeki Nakagawa, Hisanori Hayashibara, Masanari Nakagome, Yoshimasa Ogawa, Yota Takamura.

Language

Japanese

Journal/Book name

Japanese:	信学技報
English:	IEICE Tech. Rep.

Volume, Number, Page

vol. 119 no. 326, MRIS2019-45 pp. 51-56

Published date

Dec. 6, 2019

Publisher

Japanese:
English:

Conference name

Japanese:	電子情報通信学会磁気記録・情報ストレージ研究会 (MRIS)
English:	IEICE Technical Committee on Magnetic Recording & Information Storage (MRIS)

Conference site

Japanese:	愛媛県松山市
English:	Matsuyama city, Ehime pref.

Official URL