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Title
Japanese:Deposition of epitaxial piezoelectric films for high intensity and high frequency ultrasonic transducers and their applications 
English:Deposition of epitaxial piezoelectric films for high intensity and high frequency ultrasonic transducers and their applications 
Author
Japanese: Mutsuo ISHIKAWA, Ayaho TSUKAMOTO, Nao SAITO, Akito ENDO, Shintaro YASUI, Marie TABARU, Hiroshi FUNAKUBO, Minoru KUROSAWA.  
English: Mutsuo ISHIKAWA, Ayaho TSUKAMOTO, Nao SAITO, Akito ENDO, Shintaro YASUI, Marie TABARU, Hiroshi FUNAKUBO, Minoru KUROSAWA.  
Language English 
Journal/Book name
Japanese:288923 
English:288923 
Volume, Number, Page        
Published date Oct. 2019 
Publisher
Japanese: 
English: 
Conference name
Japanese:International Workshop on Piezoelectric Materials and Applications in Actuators ( IWPMA 2019) 
English:International Workshop on Piezoelectric Materials and Applications in Actuators ( IWPMA 2019) 
Conference site
Japanese:France 
English:France 

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