High Hall-Effect Mobility of Atomic-Layered Polycrystalline-ZrS2 Film using Sputtering and Sulfur Annealing

Publication Information

Title

Japanese:
English:	High Hall-Effect Mobility of Atomic-Layered Polycrystalline-ZrS2 Film using Sputtering and Sulfur Annealing

Author

Japanese:	濱田昌也, Kentaro Matsuura, 坂本拓朗, 宗田伊理也, 星井拓也, 角嶋邦之, 筒井一生, 若林整.
English:	Masaya Hamada, Kentaro Matsuura, Takuro Sakamoto, Iriya Muneta, Takuya Hoshii, Kuniyuki Kakushima, Kazuo Tsutsui, Hitoshi Wakabayashi.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:	3rd Electron Devices Technology and Manufactureing Conference (EDTM2019)

Conference site

Japanese:
English: