Fundamental study on reducing on-resistance by introducing strain  into silicon vertical power devices

Publication Information

Title

Japanese:
English:	Fundamental study on reducing on-resistance by introducing strain into silicon vertical power devices

Author

Japanese:	井上毅哉, 星井拓也, Takuo Kikuchi, Hidehiko Yabuhara, Kazuyuki Ito, 角嶋邦之, 若林整, 岩井洋, Junichi Tonotani, 筒井一生.
English:	Takeya Inoue, Takuya Hoshii, Takuo Kikuchi, Hidehiko Yabuhara, Kazuyuki Ito, Kuniyuki Kakushima, Hitoshi Wakabayashi, Hiroshi Iwai, Junichi Tonotani, Kazuo Tsutsui.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:	3rd Electron Devices Technology and Manufactureing Conference (EDTM2019)

Conference site

Japanese:
English: