Thin-Film π-Type Micro TEG Using Vacuum/Insulator-Hybrid Isolation with Convex-Shape Hot-Plate Module Structure for Wearable Device Applications

Publication Information

Title

Japanese:
English:	Thin-Film π-Type Micro TEG Using Vacuum/Insulator-Hybrid Isolation with Convex-Shape Hot-Plate Module Structure for Wearable Device Applications

Author

Japanese:	塩津勇作, 清野稔仁, 千脇那菜, 菅原聡.
English:	Y. Shiotsu, T. Seino, N. Chiwaki, S. Sugahara.

Language

English

Journal/Book name

Japanese:
English:	Journal of Physics: Conference Series

Volume, Number, Page

Vol. 1407 pp. 1-4

Published date

Dec. 4, 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: