Siを導入したHfO2のMIMキャパシタの容量特性

Publication Information

Title

Japanese:	Siを導入したHfO2のMIMキャパシタの容量特性
English:

Author

Japanese:	岩塚春樹, 星井拓也, 宗田伊理也, 若林整, 筒井一生, 角嶋邦之.
English:	Haruki Iwatsuka, Takuya Hoshii, Iriya Muneta, Hitoshi Wakabayashi, KAZUO TSUTSUI, Kuniyuki KAKUSHIMA.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 18, 2018

Publisher

Japanese:
English:

Conference name

Japanese:	第79回応用物理学会秋季学術講演会
English:

Conference site

Japanese:	名古屋
English: